• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
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  • 优先权
    • 专利摘要:
    A semiconductor light emitting device of the present invention comprises: a compound semiconductor substrate having a first conductivity type; Light emitting layer; A compound semiconductor interface layer of a second conductivity type not containing Al; And a current diffusion layer of a second conductivity type made of a compound semiconductor containing no Al.
    公开号:KR19980070847A
    申请号:KR1019980002296
    申请日:1998-01-26
    公开日:1998-10-26
    发明作者:사사키가주아키；나카무라주니치
    申请人:쯔지하루오；샤프가부시끼가이샤；
    IPC主号:
    专利说明:

    Semiconductor light emitting device and manufacturing method thereof
    The present invention relates to a semiconductor light emitting device. More specifically, the present invention relates to a structure and a manufacturing method of a quaternary alloy light emitting diode (LED) made of a quaternary alloy material of AlGaInP constituting a high-brightness LED emitting light of red to green bands. will be.
    In recent years, ternary high brightness alloy LEDs made of AlGaInP have been in the spotlight as light emitting elements for various types of display devices for indoor and outdoor applications. The quaternary alloy material allows the fabrication of LEDs that emit in the wide visible wavelength range of red to green bands.
    The structure of the conventional quaternary alloy LED 1100 with a yellow band is shown in Figs. 7A and 7B: Fig. 7A is a perspective view; 7B is a schematic cross-sectional view.
    In this structure, n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 51 (Si doped, carrier concentration: about 5x10 by metal organic chemical vapor deposition (MOCVD) on n-GaAs substrate 50). 17 cm -3 , thickness: about 1.5 μm, non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer 52 (thickness: about 0.7 μm), p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P clad layer (53) (Zn dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5μm), p-Al 0.7 Ga 0.3 As current diffusion layer 54 (Zn dope, carrier concentration: about 3x10 18 cm -3 , Thickness: about 5 mu m), and p-GaAs ohmic contact layer 55 (Zn dope, carrier concentration: about 3x10 18 cm -3 , thickness: about 0.5 mu m) are sequentially formed in this order. In addition, lower and upper electrodes 56 and 57 are formed on the rear surface of the substrate 50 and the upper surface of the growth layer structure, respectively. The upper electrode 57 of the upper surface of the growth layer structure, together with the p-GaAs ohmic contact layer 55, is patterned circularly in the central region of the upper surface of the structure. Other portions of the upper electrode 57 and the p-GaAs ohmic contact layer 55 are removed by etching, leaving a circular portion in the center region.
    The axial luminous intensity (unit: candela (cd)) of the molded LED device is one of the indicators of the brightness of the LED. In the conventional LED 1100 shown in FIGS. 7A and 7B, when the axial diffusion angle of the emitted light is about ± 4 °, the operating voltage is about 2.0V, and the driving current is about 20mA, the axial brightness is about 8 candelas. to be.
    Axial luminous intensity increases as the condensing properties of the LED improve (ie, the axial diffusion range of the emitted light decreases). In addition, LEDs with improved light collection characteristics are useful for communications.
    Another conventional LED 1200 for communication is shown in FIGS. 8A and 8B: FIG. 8A is a perspective view; 8B is a schematic cross-sectional view of the 8b-8b 'line of the LED 1200 shown in FIG. 8A. The conventional LED 1200 shown in FIGS. 8A and 8B is a yellow band AlGaInP alloy system LED and has the following structure.
    As shown in the cross-sectional view of FIG. 8B, n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 51 (Si doped, carrier concentration: about 1x10 by MOCVD method on n-GaAs substrate 50). 18 cm -3 , thickness: about 1.0 μm, non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer 52 (thickness: about 0.6 μm), p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P clad layer (53) (Zn dope, carrier concentration: about 1x10 18 cm -3 , thickness: about 1.0 μm), n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P current limiting layer 58 (Si dope, carrier concentration: about 2 × 10 18 cm −3 , thickness: about 0.4 μm), p-Al 0.7 Ga 0.3 As current diffusion layer 54 (Zn dope, carrier concentration: about 3 × 10 18 cm −3 , thickness: about 6 μm), and p-GaAs ohmic The contact layer 55 (Zn dope, carrier concentration: about 3x10 18 cm -3 , thickness: about 0.5 mu m) is formed sequentially in the above order.
    The center region of the n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P current limiting layer 58 is circularly etched to form a light emitting region, and the p-Al 0.7 Ga 0.3 As current diffusion layer 54 is etched and removed It is regrown on the current confined layer 58 including the region. Reference numeral 59 denotes a regrowth interface.
    In addition, lower and upper electrodes 56 and 57 are formed on the rear surface of the substrate 50 and the upper surface of the growth layer structure, respectively. The upper electrode 57 and the p-GaAs ohmic contact layer 55 are formed in a donut shape by etching a central region thereof so as to have holes of the same size and shape as those of the current limiting layer 58 that have been etched away.
    In the conventional LED device 1200, the injected current flows intensively to the central region, thereby reducing the spot size of the emitted light. As a result, the light condensing properties of the device molded with the resin can be improved and its axial luminous intensity can be increased.
    However, in the conventional LED 1200 shown in FIGS. 8A and 8B, the p-Al 0.7 Ga 0.3 As current spreading layer 54 includes p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 53 containing Al. Regrow on). Accordingly, oxygen is easily absorbed into the regrowth interface 59 (see FIG. 8B), causing various losses such as an increase in resistance and non-luminescence recombination of the injected carrier.
    Typical operating characteristics of the conventional LED 1200 are as follows: When a current of 20 mA is supplied, the axial diffusion angle is about ± 2 °, the luminance is about 16 candelas, and the operating voltage is 3.0V. The conventional LED 1100 shown in FIGS. 7A and 7B (made of the same quaternary alloy material and having a current of 20 mA, the axial diffusion angle is about ± 4 °, the luminance is about 8 candelas, and the operating voltage is 2.0V In comparison, the axial luminosity of the LED 1200 shown in FIGS. 8A and 8B is increased by only 2 times, but the operating voltage is greatly increased. In the LED 1200 shown in FIGS. 8A and 8B, the luminance is about four times (ie, about 32 candelas) since the axial diffusion angle is reduced to about one half of the LED 1100 shown in FIGS. 7A and 7B. It is expected to increase.
    In order to solve the above problems, another conventional semiconductor light emitting device 1300 having a structure as shown in FIG. 9 has been proposed. The shape of the electrode and the current limiting layer on the upper surface of the growth layer structure of the semiconductor light emitting device 1300 shown in FIG. 9 is the same as the LED 1200 shown in FIGS. 8A and 8B.
    As shown in the sectional view in FIG. 9, n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 51 (Si doped, carrier concentration: about 1x10) by MOCVD method on the n-GaAs substrate 50. 18 cm -3 , thickness: about 1.0 μm, non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer 52 (thickness: about 0.6 μm), and p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P clad Layer 53 (Zn dope, carrier concentration: about 1 × 10 18 cm −3 , thickness: about 1.0 μm) is sequentially formed in this order. Next, unlike the conventional device 1200 illustrated in FIGS. 8A and 8B, the device 1300 illustrated in FIG. 9 includes Al on a p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 53. A p-GaInP layer 60 (Zn dope, carrier concentration: about 1x10 18 cm -3 , thickness: about 100 kPa) is formed. Since the layer acts as an underlayer during the regrowth process, less oxygen is absorbed into the regrowth interface 59 so that the conditions of the regrowth interface 59 can be improved compared to the conventional device 1200 shown in FIGS. 8A and 8B. Can be.
    The remaining portion of element 1300 shown in FIG. 9 is the same as the portion of element 1200 shown in FIG. 8B. Specifically, n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P current limiting layer 58 (Si dope, carrier concentration: about 2x10 18 cm -3 , thickness: about 0.4μm) on p-GaInP layer 60, p-Al 0.7 Ga 0.3 As current diffusion layer 54 (Zn dope, carrier concentration: about 3x10 18 cm -3 , thickness: about 6 μm), and p-GaAs ohmic contact layer 55 (Zn dope, carrier concentration: about 3 × 10 18 cm −3 , thickness: about 0.5 μm) are sequentially formed in this order.
    A semiconductor light emitting device of the present invention comprises: a compound semiconductor substrate having a first conductivity type; Light emitting layer; A compound semiconductor interface layer of a second conductivity type not containing Al; And a current diffusion layer of a second conductivity type made of a compound semiconductor containing no Al.
    A current limiting layer of a first conductivity type of a compound semiconductor not containing Al is further provided between the compound semiconductor interface layer and the current spreading layer.
    The carrier concentration of the current spreading layer increases from the region on the compound semiconductor interface layer toward the region under the upper electrode.
    The light emitting layer has a double hetero structure in which a first conductive AlGaInP or AlInP cladding layer, an AlGaInP or GaInP active layer, and a second conductive AlGaInP or AlInP cladding layer are sequentially formed in this order.
    A semiconductor layer providing a light reflection function is further provided between the compound semiconductor substrate and the light emitting layer.
    A bandgap adjusting layer having an intermediate bandgap is further provided between the light emitting layer and the compound semiconductor interface layer.
    A buffer layer is further provided between the compound semiconductor substrate and the light emitting layer.
    The compound semiconductor interface layer, current limiting layer, and current diffusion layer are made of GaP compound material. Preferably, the compound semiconductor interface layer, current limiting layer, and current diffusion layer are made of GaP compound material of the same composition ratio.
    The current limiting layer has a hole in the center portion of the semiconductor light emitting element.
    The compound semiconductor interface layer has a thickness of 3.0 μm or less.
    The compound semiconductor interface layer has a carrier concentration in the range of about 2 × 10 16 cm −3 −2 × 10 18 cm −3 , and the current spreading layer has a carrier concentration of about 2 × 10 18 cm −3 or more.
    According to another aspect of the present invention, a method for manufacturing a semiconductor light emitting device having the above characteristics is provided. The method comprises: forming a compound semiconductor interface layer and a light emitting layer that do not contain Al on the compound semiconductor substrate; And forming a current spreading layer on the compound semiconductor interface layer. The growth process is stopped for a predetermined period of time so that the regrowth interface is disposed on the surface of the compound semiconductor interface layer.
    Hereinafter, the action and / or effect obtained by the present invention will be briefly described.
    The inventors found that the operating characteristics of the LED 1300 shown in FIG. 9 are still unsatisfactory. In particular, at an operating voltage of 2.4V, the LED 1300 has an axial diffusion angle of about ± 2 ° and a brightness of about 24 candelas. The reason is estimated as follows.
    In the LED 1300, the underlayer of the regrowth process is a p-GaInP layer 60, while the regrowth layer 54 is a p-Al 0.7 Ga 0.3 As current diffusion layer 54. The layers 60 and 54 are arsenic (As) in the other Group V devices, ie layer 54 and phosphorus (P) in layer 60. As a result, it is difficult to stoichiometrically match the layers 54 and 60. In addition, the conditions of the regrowth interface 59 are still unsatisfactory, resulting in the formation of a high resistance layer. Thus, the injected carriers also suffer large losses.
    The present invention has been made in view of the above findings by the present inventors.
    When the present invention is applied to a semiconductor light emitting device of an AlGaInP alloy system, the semiconductor light emitting device of the present invention comprises: a compound semiconductor substrate having a first conductivity type (n-GaAs); Buffer layer (n-GaAs); Light emitting layer (clad layer / active layer / clad layer); A compound semiconductor interface layer (p-GaP) of a second conductivity type containing no Al; A first conductivity type current limiting layer (n-GaP) made of a compound semiconductor containing no Al; And a current diffusion layer (p-GaP) of a second conductivity type made of a compound semiconductor containing no Al.
    The growth process is stopped so that the regrowth interface is disposed on the surface of the compound semiconductor interface layer containing no Al. Thus, oxygen is not absorbed into the regrowth interface.
    In addition, since layers made of the same GaP material are formed with a regrowth interface inserted therebetween, interface levels due to stoichiometric differences are not generated.
    Accordingly, the present invention can provide a semiconductor light emitting device that realizes low resistance and high brightness.
    Accordingly, the present invention disclosed in the present specification provides (1) semiconductor light emission that realizes low resistance and high brightness by preventing oxygen from being absorbed by the regrowth interface between the underlying layer and the regrowth layer and preventing generation of the interface level due to stoichiometric differences. Device, and (2) a method of manufacturing the semiconductor light emitting device.
    The above advantages of the present invention will become more apparent to those skilled in the art upon reading the following description with reference to the accompanying drawings.
    1A and 1B show a semiconductor light emitting device of a first embodiment of the present invention: Fig. 1A is a perspective view thereof; 1B is a schematic cross-sectional view.
    FIG. 2 is a graph showing the relationship between the thickness and the axial luminous intensity of the p-GaP interface layer serving as the underlying layer before the regrowth of the semiconductor light emitting device of the first embodiment of the present invention.
    3A and 3B show a semiconductor light emitting device of a second embodiment of the present invention: Fig. 3A is a perspective view thereof; 3B is a schematic cross-sectional view.
    FIG. 4 is a graph showing the relationship between the axial luminous intensity and the carrier concentration of the p-GaP interface layer, with the carrier concentration of the p-GaP current diffusion layer as a variable in the semiconductor light emitting device of the second embodiment of the present invention.
    5 is a schematic cross-sectional view of a semiconductor light emitting device according to a third embodiment of the present invention.
    6 is a schematic cross-sectional view of a semiconductor light emitting device of a fourth embodiment of the present invention.
    7A and 7B show a conventional quaternary alloy light emitting diode for a yellow band, FIG. 7A is a perspective view thereof, and FIG. 7B is a schematic cross sectional view thereof.
    8A and 8B show a conventional communication light emitting diode, FIG. 8A is a perspective view thereof, and FIG. 8B is a cross-sectional view taken along the line 8b-8b '.
    9 is a schematic cross-sectional view of another conventional semiconductor light emitting device showing a regrowth interface.
    Hereinafter, embodiments of the present invention will be described with reference to FIGS. 1A to 6.
    Example 1
    1A and 1B show a semiconductor light emitting device 100 of a first embodiment of the present invention: FIG. 1A is a schematic perspective view thereof; 1B is a schematic cross-sectional view.
    As shown in Fig. 1A, n-GaAs buffer layer 11 (Si dope, carrier concentration of about 5x10 17 cm -3 , thickness: about 0.5 μm) by MOCVD on n-GaAs substrate 10, n -(Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 12 (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5μm), non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer (13) (thickness: about 0.7 μm), and p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 14 (Zn dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5 μm) It is formed sequentially in the above order. Next, the p-GaP interface layer 15 without Al (Zn dope, carrier concentration: about 2x10 18 cm -3 , thickness: about 1.5 μm) and the n-GaP current limiting layer 16 (Si dope, carrier Concentration: about 1 × 10 18 cm −3 , thickness: about 0.5 μm), and a patterning process is performed on the n-GaP current limiting layer 16. Subsequently, a p-GaP current spreading layer 17 (Zn dope, carrier concentration: about 2x10 18 cm -3 , thickness: about 5 μm) is formed on the patterned current limiting layer 16. Finally, the n-electrode 18 and the p-electrode 19 are formed on the back surface of the substrate 10 and the top surface of the growth layer structure, respectively.
    Since the current spreading layer 17 is a high concentration p-GaP layer, it is not necessary to form an ohmic contact layer. The n-GaP current limiting layer 16 is etched to have a circular hole in its central portion. The electrode 19 on the upper surface of the growth layer structure also has a circular hole in the center thereof, which is in the form of a window for emitting emitted light.
    The semiconductor light emitting device 100 of the first embodiment of the present invention is manufactured in the following manner.
    First, n-GaAs buffer layer 11 (Si dope, carrier concentration 5x10 17 cm -3 , thickness: about 0.5 μm), n- (Al 0.7 Ga 0.3 ) by MOCVD on n-GaAs substrate 10. 0.5 In 0.5 P cladding layer 12 (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5 μm), non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer 13 (thickness: about 0.7 μm), p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 14 (Zn dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5 μm), p-GaP interface layer 15 (Zn dope, carrier concentration: about 2x10 18 cm -3 , thickness: about 1.5μm), and n-GaP current limiting layer 16 (Si dope, carrier concentration: about 1x10 18 cm -3 , thickness: about 0.5μm ) Are formed continuously.
    The growth process is then stopped for a period of time, and the wafer is taken out of the MOCVD apparatus and patterned so that the central portion of the n-GaP current confinement layer 16 is etched in a circle using heated sulfuric acid. After the wafer is again placed in the MOCVD apparatus, the regrowth process starts with the regrowth interface 20 disposed on the surface of the interface layer 15, and the p-GaP current diffusion layer 17 (Zn dope, carrier concentration) is started. : About 2 × 10 18 cm −3 , thickness: about 5 μm) is grown on the patterned current limiting layer 16. Finally, the n-electrode 18 and the p-electrode 19 are formed on the back surface of the substrate 10 and the top surface of the growth layer structure, respectively.
    In this embodiment, the underlying layer before regrowth is not the p-AlGaInP clad layer, but the p-GaP interface layer 15 that does not contain Al, as in the conventional device 1200 shown in FIGS. 8A and 8B. Thus, the regrowth interface 20 is not oxidized. Further, the p-GaP layers 15 and 17 made of the same semiconductor material having the same composition ratio are formed with the regrowth interface 20 inserted therebetween, so that there is no difference between their stoichiometry. As a result, the resistance does not increase and no carrier is lost.
    When the semiconductor light emitting element 100 of this embodiment is molded from a resin and its operating characteristics are measured, satisfactory results can be obtained, and its luminance is about 32 candela (indicated by the axial luminance) and the operating voltage is About 2.0V.
    In general, the n-GaAs substrate 10 corresponds to the compound semiconductor substrate of the first conductivity type, and the n-GaAs buffer layer 11 corresponds to the buffer layer interposed between the first conductivity type compound semiconductor substrate and the light emitting layer. n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 12, non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer 13 and p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer ( The multilayer structure including 14) corresponds to the light emitting layer, and the p-GaP interface layer 15 containing no Al corresponds to the compound semiconductor interface layer of the second conductivity type containing no Al, and the n-GaP current limiting. The layer 16 corresponds to the current limiting layer of the first conductivity type, which does not contain Al, and the p-GaP current spreading layer 17 corresponds to the current spreading layer of the second conductivity type, which is a compound semiconductor containing no Al. .
    Alternatively, the present invention also provides an AlGaInP or AlInP clad layer of a first conductivity type; A first conductivity type or second conductivity type or non-doped AlGaInP or GaInP active layer; And a light emitting layer having a double hetero structure including an AlGaInP or AlInP clad layer of the second conductivity type may be used.
    In addition, the semiconductor light emitting device of the present invention is not limited to yellow band light emission. According to the present invention, red band emission with an active layer of GaInP or (Al 0.05 Ga 0.95 ) 0.5 In 0.5 P (its wavelength is about 655 nm and about 644 nm, respectively), and an active layer of (Al 0.2 Ga 0.8 ) 0.5 In 0.5 P Band emission (its wavelength is about 610 nm), yellow band emission (wavelength about 570 nm) with active layer (Al 0.38 Ga 0.55 ) 0.5 In 0.5 P and green band emission with active layer (Al 0.45 Ga 0.55 ) 0.5 In 0.5 P It is also applicable to (wavelength of about 560 nm).
    The compound of the clad layer is not limited to (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P, but may be Al 0.5 In 0.5 P. In addition, it is possible to form a semiconductor light emitting element in which the p-type conductivity type semiconductor substrate and the conductivity type of each layer are opposite as described above.
    2 shows the relationship between the thickness and the axial luminous intensity of the p-GaP interface layer 15 serving as the underlying layer before regrowth of the semiconductor light emitting device 100 of the present invention. It is assumed that the thickness of the p-GaP current diffusion layer 17 is constant (about 5 mu m).
    The point near 0 on the horizontal axis indicates that the thickness of the p-GaP interface layer 15 is about 100 m 3 (= 0.01 μm). As a result, the axial luminous intensity is high (in the range of 31 candelas to 33 candelas) for the thickness of about 0.5 μm, about 1.0 μm, about 1.5 μm, and about 2.0 μm of the p-GaP interface layer 15. However, when the thickness of the p-GaP interface layer 15 exceeds 2.5 μm and is 3.0 μm or more, the axial luminous intensity decreases significantly. This is considered to be because the current component which escapes to the peripheral region under the upper electrode 19 in the p-GaP interface layer 15 increases. Therefore, the thickness of the p-GaP interface layer 15 is preferably in the range of about 0.01-3.0 μm.
    Example 2
    3A and 3B show a semiconductor light emitting device 200 of a second embodiment of the present invention: FIG. 3A is a schematic perspective view thereof; 3B is a schematic cross-sectional view.
    3A and 3B, the semiconductor light emitting device 200 according to the second exemplary embodiment of the present invention has a p- (Al 0.2 Ga 0.8 ) 0.75 In 0.25 P band gap adjusting layer 21 having a p- (Al 0.7 Ga 0.3 ) 0.5 1A and 1B are inserted between the In 0.5 P cladding layer 14 and the p-GaP interface layer 15 and the holes of the light emitting regions of the current limiting layer 16 and the electrode 19 are formed in a rectangular shape. Different from the semiconductor light emitting device 100 of the first embodiment of the present invention shown.
    As shown in FIG. 3B, the n-GaAs buffer layer 11 (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 0.5 μm) was formed on the n-GaAs substrate 10 by MOCVD. n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 12 (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5μm), non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P Active layer 13 (thickness: about 0.7 μm), and p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 14 (Zn-doped, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5 μm) These are formed sequentially in this order. Next, thereon, p- (Al 0.2 Ga 0.8 ) 0.75 In 0.25 P band gap adjusting layer 21 (Zn dope, carrier concentration: about 1x10 18 cm -3 , thickness: about 0.2 μm), which does not contain Al p-GaP layer (15) (Zn-doped, carrier concentration: about 2x10 18 cm -3, thickness: about 1.5μm), and n-GaP current limiting layer (16) (Si-doped, carrier concentration: about 1x10 18 cm - 3 , thickness: 0.5 m) is formed.
    The growth process is then stopped for a period of time, and the wafer is taken out of the MOCVD apparatus and patterned so that the central portion of the n-GaP current confinement layer 16 is etched in a rectangle using heated sulfuric acid. After the wafer is again placed in the MOCVD apparatus, the regrowth process starts with the regrowth interface 20 disposed on the surface of the interface layer 15, and the p-GaP current diffusion layer 17 (Zn dope, carrier concentration) is started. : About 3 × 10 18 cm −3 , thickness: about 5 μm) is formed on the patterned current limiting layer 16. Finally, the n-electrode 18 and the p-electrode 19 are formed on the back surface of the substrate 10 and the top surface of the growth layer structure, respectively.
    The n-GaP current limiting layer 16 is etched to have a rectangular hole in its central portion. The electrode 19 of the upper surface of the growth layer structure also has a rectangular hole in the center thereof, which is in the form of a window for emitting emitted light.
    The bandgap adjustment layer (ie, p- (Al 0.2 Ga 0.8 ) 0.75 In 0.25 P bandgap adjustment layer) 21 is a lower clad layer (ie, p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P clad layer) ( 14 has an intermediate bandgap between the bandgap of 14) and the bandgap of the interface layer (i.e., p-GaP layer) 15, and serves to reduce the resistance of the interface between the layers 14,15. In particular, the band gap of the cladding layer 14 is about 2.33 eV, the band gap of the band gap adjusting layer 21 is about 2.55 eV, and the band gap of the p-GaP interface layer 15 is about 2.78 eV.
    When the semiconductor light emitting device of the present invention shown in Figs. 3A and 3B is molded from a resin and its operating characteristics are measured, its luminance is about 34 candela (indicated by the axial luminosity) and the operating voltage is about 1.9V.
    In addition, the design guidelines of the band gap adjustment layer 21 can be considered as follows. In particular, the energy position at the bottom of the conduction band of the bandgap adjustment layer 21 before bonding is the energy position at the bottom of the conduction band of the cladding layer 14 before bonding and the energy position at the bottom of the conduction band of the GaP interface layer 15 before bonding. It shall be located in between. In addition, the energy position of the upper end of the valence band of the band gap adjustment layer 21 before the bonding is the energy position of the upper end of the valence band of the cladding layer 14 before the bonding and the home appliance of the GaP interface layer 15 before the bonding. It shall be located between the energy positions of the upper end of the band.
    FIG. 4 shows the relationship between the axial luminous intensity of the semiconductor light emitting device 200 having the structure shown in FIGS. 3A and 3B and the carrier concentration of the p-GaP interface layer 15. The carrier of the p-GaP current diffusion layer 17 is shown in FIG. This is a graph showing concentration as a variable.
    In Fig. 4, when the concentration of the p-GaP current diffusion layer 17 is about 5x10 17 cm -3 (denoted by), the carrier concentration of the p-GaP interface layer 15 is about 10 candelas in axial luminous intensity, About 2x10 17 cm -3 , about 5x10 17 cm -3 , about 1x10 18 cm -3 , about 2x10 18 cm respectively corresponding to about 10 candelas, about 7 candelas, about 5 candelas, about 3 candelas and about 2 candelalines -3 , about 3x10 18 cm -3 and about 5x10 18 cm -3 . Similarly, when the carrier concentration of the p-GaP current diffusion layer 17 is about 1 × 10 18 cm −3 (denoted by Δ), the axial luminous intensity corresponding to the respective carrier concentrations of the p-GaP interface layer 15 is described. About 25 candelas, about 25 candelas, about 20 candelas, about 13 candelas, about 8 candelas, and about 2 candelas. When the carrier concentration of the p-GaP current diffusion layer 17 is about 2x10 18 cm -3 (denoted by ○), the axial luminous intensity is about 33 candelas corresponding to the respective carrier concentrations of the p-GaP interface layer 15 described above. , About 34 candelas, about 32 candelas, about 30 candelas, about 20 candelas, and about 5 candelas. Further, when the carrier concentration of the p-GaP current diffusion layer 17 is about 5x10 18 cm -3 (denoted by ), The axial luminous intensity is approximately corresponding to the respective carrier concentrations of the p-GaP interface layer 15 described above. 33 candelas, about 35 candelas, about 33 candelas, about 30 candelas, about 21 candelas, and about 15 candelas.
    From the results of FIG. 4, the carrier concentration of the p-GaP interface layer 15 (i.e., the compound semiconductor interface layer of the second conductivity type containing no Al) is low and the p-GaP current diffusion layer 17 (i.e., Al The carrier concentration of the current diffusion layer of the second conductivity type made of a compound semiconductor which is not included is high, and as a result, the brightness is high. In particular, a suitable carrier concentration range of the p-GaP interface layer 15 is about 2x10 18 cm -3 or less, and a suitable carrier concentration range of the p-GaP current diffusion layer 17 is about 2x10 18 cm -3 or more. When the carrier concentration of the p-GaP interface layer 15 is lower than about 2x10 16 cm -3 , the operating voltage is increased. Therefore, the lower limit of the optimum carrier concentration of the p-GaP interface layer 15 is estimated to be about 2x10 16 cm -3 .
    Example 3
    5 is a cross-sectional view showing a semiconductor light emitting device 300 of a third embodiment of the present invention.
    In the semiconductor light emitting device 300 of the third embodiment of the present invention shown in FIG. 5, the p-GaP current spreading layer 17 (the current spreading layer of the second conductivity type made of a compound semiconductor not containing Al) has a two-layer structure. In this respect, it differs from the semiconductor light emitting device 100 of the first embodiment of the present invention shown in Figs. 1A and 1B. The lower portion 17a of the p-GaP current spreading layer 17 is doped with Zn and has a carrier concentration of about 1 × 10 18 cm −3 and a thickness of about 2 μm. The upper portion 17b of the p-GaP current spreading layer 17 is doped with Zn and has a carrier concentration of about 3 × 10 18 cm −3 and a thickness of about 3 μm.
    As shown in Fig. 5, the n-GaAs buffer layer 11 (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 0.5 μm) by MOCVD on the n-GaAs substrate 10, n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 12 (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5μm), non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P Active layer 13 (thickness: about 0.7 μm), and p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 14 (Zn-doped, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5 μm) These are formed sequentially in this order. Next, the p-GaP interface layer 15 (Zn-doped, carrier concentration: about 1x10 18 cm -3 , thickness: about 2 μm) and n-GaP current limiting layer 16 (Si-doped) do not contain Al thereon. , Carrier concentration: about 1 × 10 18 cm −3 , thickness: about 0.5 μm).
    The growth process is then stopped for a period of time, and the wafer is taken out of the MOCVD apparatus and patterned so that the central portion of the n-GaP current confinement layer 16 is etched in a circle using heated sulfuric acid. After the wafer is placed in the MOCVD apparatus again, the regrowth process starts with the regrowth interface 20 disposed on the surface of the interface layer 15, and the first p-GaP current diffusion layer 17a (Zn dope, Carrier concentration: about 1x10 18 cm -3 , thickness: about 2 μm) and second p-GaP current diffusion layer 17b (Zn-doped, carrier concentration: about 3x10 18 cm -3 , thickness: about 3 μm) patterned current limit It is formed on the layer 16 as a two-layer p-GaP current diffusion layer 17. Finally, the n-electrode 18 and the p-electrode 19 are formed on the back surface of the substrate 10 and the top surface of the growth layer structure, respectively.
    The n-GaP current limiting layer 16 is etched to have a circular hole in its central portion, as shown in FIG. The electrode 19 on the upper surface of the growth layer structure also has a circular hole in the center thereof, which is in the form of a window for emitting emitted light.
    In the case of the device structure, in terms of carrier concentration, the boundary between the GaP interface layer and the GaP current spreading layer corresponds to the boundary between the first p-GaP current spreading layer 17a and the second p-GaP current spreading layer 17b. . That is, in the semiconductor light emitting device 300 of this embodiment, the carrier concentration of the second conductivity type current spreading layer 17 made of a compound semiconductor containing no Al is the upper electrode 19 at the portion on the compound semiconductor interface layer 15. It has a structure that increases toward the lower region.
    When the semiconductor light emitting device 300 of the present invention is molded from a resin and its operating characteristics are measured, the operating characteristics are also satisfactory: its luminance is about 35 candela (indicated by the axial luminance) and the operating voltage is about 1.9. V.
    Example 4
    6 is a cross-sectional view of a semiconductor light emitting device 400 of a fourth embodiment of the present invention.
    In the semiconductor light emitting device 400 according to the fourth embodiment of the present invention shown in FIG. 6, 10 pairs of n-Al 0.5 In 0.5 P layers (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 0.5 μm ) And (Al 0.4 Ga 0.6 ) 0.5 In 0.5 P layer (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 0.5μm) light reflection layer 22 alternately formed n-GaAs buffer layer (11) (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 0.5μm) and n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 12 (Si dope, carrier concentration: about 5x10 17 cm -3 , thickness: about 1.5 mu m), different from the semiconductor light emitting element 100 of the first embodiment of the present invention shown in Figs. 1A and 1B.
    When the semiconductor light emitting device 400 of the present invention is molded from a resin and its operating characteristics are measured, the operating characteristics are satisfactory: its luminance is about 48 candela (indicated by the axial luminance) and the operating voltage is about 1.9V. to be.
    In Fig. 6, reference numeral 10 denotes an n-GaAs substrate, 11 denotes an n-GaAs buffer layer, 12 denotes an n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer, and 13 denotes a non-doped layer. Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer, (14) p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P clad layer, (15) p-GaP interface layer without Al, (16) n GaP current limiting layer, (17) p-GaP current limiting layer, (18) n-electrode on the back of substrate 10, (19) p-electrode on top of growth layer structure, (20) The silver regrowth interface and 22 represent the light reflection layer. Carrier concentration and thickness of each layer except the light reflection layer 22 are the same as those in Figs.
    The semiconductor light emitting device 400 manufacturing process of this embodiment is similar to those used in the above-described embodiments. Therefore, description thereof is omitted.
    In general, in the semiconductor light emitting device 400, a semiconductor layer 22 providing a light reflection function is inserted between a compound semiconductor substrate (n-GaAs substrate) 10 and a light emitting layer of a first conductivity type. The light emitting layer is n- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding layer 12, non-doped (Al 0.3 Ga 0.7 ) 0.5 In 0.5 P active layer 13 and p- (Al 0.7 Ga 0.3 ) 0.5 In 0.5 P cladding Corresponds to layer 14.
    As described above, the semiconductor light emitting device of the present invention comprises: a compound semiconductor substrate of a first conductivity type; Light emitting layer; A compound semiconductor interface layer of a second conductivity type not containing Al; And a current diffusion layer of a second conductivity type made of a compound semiconductor containing no Al. By using the above structure, it is possible to provide a semiconductor light emitting device having low resistance and high luminous luminance, in which oxygen is not absorbed into the regrowth interface between the compound semiconductor interface layer and the current diffusion layer, which does not contain Al.
    In the semiconductor light emitting device of the present invention, a current limiting layer of the first conductivity type made of a compound semiconductor not containing Al can be formed between the compound semiconductor interface layer and the current spreading layer. In this structure, the current can be concentrated in a narrow area. As a result, the size of the light emitting spot can be reduced, thereby realizing a semiconductor light emitting element with increased light emission luminance. Therefore, the light condensing property of the semiconductor light emitting device after being molded with the resin is improved to increase the axial brightness.
    Further, in the semiconductor light emitting device, the carrier concentration of the current spreading layer is increased from the region on the compound semiconductor interface layer toward the region under the upper electrode. In the above structure, the impurity providing the second conductivity type is not diffused through the current diffusion layer and the cladding layer into the active layer, so as not to degrade the crystallinity of the device, and the light emission luminance of the device is not lowered.
    In addition, the light emitting layer of the semiconductor light emitting device of the present invention is an AlGaInP or AlInP cladding layer of the first conductivity type, the first or second conductive or non-doped AlGaInP or GaInP active layer, and AlGaInP or AlInP cladding layer of the second conductivity type. It has a double hetero structure sequentially formed in order. The cladding layer of AlGaInP or AlInP has a large band gap and is easy to oxidize to generate a non-luminescent level. However, according to the present invention, by forming a compound semiconductor interface layer of a second conductive type of a compound semiconductor containing no Al thereon, a good antioxidant effect can be obtained.
    Further, in the semiconductor light emitting device of the present invention, a semiconductor layer providing a light reflection function is inserted between the compound semiconductor substrate and the light emitting layer. In the above structure, the light emitted toward the substrate is reflected and discharged to the outside of the semiconductor light emitting device, thereby increasing the light emission luminance of the device.
    Further, in the semiconductor light emitting device of the present invention, a bandgap adjusting layer having an intermediate bandgap may be provided between the light emitting layer and the compound semiconductor interface layer. In the above structure, the resistance between the light emitting layer and the compound semiconductor interface layer can be reduced, so that the operating voltage of the device can also be reduced.
    In the semiconductor light emitting device of the present invention, a buffer layer may be provided between the compound semiconductor substrate and the light emitting layer. In the above structure, the crystallinity of the light emitting layer growing on the buffer layer can be improved, so that the light emission luminance of the device can be increased.
    Further, in the semiconductor light emitting device of the present invention, each compound semiconductor interface layer, current limiting layer, and current diffusion layer are made of GaP compound material. Therefore, the occurrence of the interface level due to the difference in stoichiometry can be prevented and no carrier is lost at the interface. As a result, the luminous luminance of the device can be increased.
    Further, in the semiconductor light emitting element of the present invention, the current limiting layer has a hole in the center portion of the semiconductor light emitting element. In the above structure, the current can be concentrated in the center portion, thereby forming a small concentrated light emitting spot in the center portion of the device. Therefore, it is possible to provide a semiconductor light emitting device having a high light emission luminance. Therefore, the light condensing property of the resin molded element can be greatly improved and the axial luminous intensity can be further increased.
    In the semiconductor light emitting device of the present invention, the thickness of the compound semiconductor interface layer is 3.0 μm or less. In the above structure, the current component diffused from the center portion of the device to the periphery of the compound semiconductor interface layer can be reduced, so that the luminance of light emitted from the center portion of the device can be further increased.
    In addition, in the semiconductor light emitting device of the present invention, the compound semiconductor interface layer has a carrier concentration in the range of about 2x10 16 cm -3 -2x10 18 cm -3 , and the current diffusion layer has a carrier concentration of about 2x10 18 cm -3 or more. In the above structure, it is possible to reliably prevent the impurity providing the second conductivity type from diffusing into the light emitting layer. As a result, the current can be spread more satisfactorily, thereby increasing the luminous luminance of the device.
    According to the semiconductor light emitting device manufacturing method of the present invention, the regrowth interface is disposed on the surface of the compound semiconductor interface layer. Thus, the method can reduce the amount of oxygen absorbed into the regrowth interface.
    Various other modifications can be readily made by those skilled in the art without departing from the spirit and scope of the invention. Accordingly, the scope of the appended claims should not be limited to the foregoing but should be interpreted more broadly.
    权利要求:
    Claims (13)
    [1" claim-type="Currently amended] A compound semiconductor substrate having a first conductivity type;
    Light emitting layer;
    A compound semiconductor interface layer of a second conductivity type not containing Al; And
    A semiconductor light emitting device comprising a current diffusion layer of a second conductivity type of a compound semiconductor containing no Al.
    [2" claim-type="Currently amended] The semiconductor light emitting device according to claim 1, wherein a current limiting layer of a first conductivity type of a compound semiconductor that does not contain Al is further provided between the compound semiconductor interface layer and the current spreading layer.
    [3" claim-type="Currently amended] 3. The semiconductor light emitting device according to claim 2, wherein the carrier concentration of the current spreading layer increases from the region on the compound semiconductor interface layer toward the region under the upper electrode.
    [4" claim-type="Currently amended] The semiconductor light emitting device of claim 2, wherein the light emitting layer has a double hetero structure in which a first conductive AlGaInP or AlInP cladding layer, an AlGaInP or GaInP active layer, and a second conductive AlGaInP or AlInP cladding layer are sequentially formed in this order. .
    [5" claim-type="Currently amended] The semiconductor light emitting device of claim 2, wherein a semiconductor layer providing a light reflection function is further provided between the compound semiconductor substrate and the light emitting layer.
    [6" claim-type="Currently amended] 3. The semiconductor light emitting device according to claim 2, wherein a band gap adjustment layer having an intermediate band gap is further provided between the light emitting layer and the compound semiconductor interface layer.
    [7" claim-type="Currently amended] The semiconductor light emitting device of claim 2, further comprising a buffer layer between the compound semiconductor substrate and the light emitting layer.
    [8" claim-type="Currently amended] The semiconductor light emitting device of claim 2, wherein the compound semiconductor interface layer, the current limiting layer, and the current spreading layer are made of a GaP compound material.
    [9" claim-type="Currently amended] The semiconductor light emitting device of claim 8, wherein the compound semiconductor interface layer, the current limiting layer, and the current diffusion layer are made of a GaP compound material having the same composition ratio.
    [10" claim-type="Currently amended] The semiconductor light emitting device of claim 2, wherein the current limiting layer has a hole in a central portion of the semiconductor light emitting device.
    [11" claim-type="Currently amended] The semiconductor light emitting device of claim 4, wherein the compound semiconductor interface layer has a thickness of 3.0 μm or less.
    [12" claim-type="Currently amended] The semiconductor light emitting device of claim 3, wherein the compound semiconductor interface layer has a carrier concentration in a range of about 2 × 10 16 cm −3 −2 × 10 18 cm −3 , and the current diffusion layer has a carrier concentration of about 2 × 10 18 cm −3 or more.
    [13" claim-type="Currently amended] A compound semiconductor substrate of a first conductivity type;
    Light emitting layer;
    A compound semiconductor interface layer of a second conductivity type not containing Al; And
    A method for manufacturing a semiconductor light emitting device comprising a current diffusion layer of a second conductivity type of a compound semiconductor containing no Al:
    Forming a compound semiconductor interface layer and a light emitting layer on the compound semiconductor substrate; And
    Forming a current spreading layer on the compound semiconductor interface layer,
    And a regrowth interface is disposed on a surface of the compound semiconductor interface layer for a predetermined period of time.
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    同族专利:
    公开号 | 公开日
    US20010016366A1|2001-08-23|
    JP3807638B2|2006-08-09|
    CN1190267A|1998-08-12|
    DE19803006A1|1998-07-30|
    DE19803006B4|2007-03-15|
    TW360985B|1999-06-11|
    CN1127153C|2003-11-05|
    JPH10214996A|1998-08-11|
    US6399409B2|2002-06-04|
    US6246078B1|2001-06-12|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    法律状态:
    1997-01-29|Priority to JP1490697A
    1997-01-29|Priority to JP97-14906
    1998-01-26|Application filed by 쯔지하루오, 샤프가부시끼가이샤
    1998-10-26|Publication of KR19980070847A
    2001-07-12|Application granted
    2001-07-12|Publication of KR100295241B1
    优先权:
    申请号 | 申请日 | 专利标题
    JP1490697A|JP3807638B2|1997-01-29|1997-01-29|Semiconductor light emitting device and manufacturing method thereof|
    JP97-14906|1997-01-29|
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